Advanced Technology Of Vacuum Application & Control

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1 Advanced Technology Of Vacuum Application & Control
AFC500 MASS FLOW CONTROLLER Type AFC500 GENERAL PURPOSE MASS FLOW CONTROLLER (Viton Seal) MFC는 Mass Flow Controller의 약자로서 Gas Bottle에서 나오는 GAS를 고객이 원하는 일정한 유량 의 값으로 흐르게 하기 위한 장치입니다. 단위로는 제조회사마다 약간의 차이를 보이지만 일반적으로 SCCM(Standard Cubic Centimeter per Minutes)을 사용합니다. Features & Benefits Dimensions ◎ AFC500 Mass Flow Controller는 일반적으로 산업용을 포함하여 반도체공정에도 사용할 수 있도록 설계되어 있습니다. ◎ AFC500 Mass Flow Controller의 Full Scale Range는 10SCCM부터 50SLM입니다. ◎ AFC500 Mass Flow Controller는 Full Scale의 1%에 해당하는 오차를 가지고 있습니다. ◎ AFC500 Mass Flow Controller는 Warm-up 시간이 거의 필요하지 않는 제품으로 설계되어 있습니다. ◎ AFC500 Mass Flow Controller는 기본적으로 9Pin D-sub Connector를 사용합니다. ◎ AFC500 Mass Flow Controller는 GMC1200과 같은 MFC Power Supply & Display Unit과 함께 사용할 수 있습니다. ◎ AFC500 Mass Flow Controller는 CE 인증 취득제품입니다. Advanced Technology Of Vacuum Application & Control 1

2 Advanced Technology Of Vacuum Application & Control
AFC500 MASS FLOW CONTROLLER Specifications Full S cale Ranges (N2 equivalent) 10,20,50,100,200,500,1000, 2000,5000,10000,20000, SCCM Maximum lnlet P ressure 150 psig Normal Operating Pressure Differential (with atmospheric pressure at the. MFCoutlet) 10 to 5000 sccm 10000 to sccm 10 to 40 psid 15 to 40 psid Control Range 2% to 100 % of F.S. Accuracy (analog) (including non-linearity, hysteresis, and non-repeata bility referenced to 760mmhg and 0°C) ±1.0% of F.S. Repeatability ±0.2% of F.S. Resolution 1.0% of F.S. Temperature Coefficients Zero Span <0.05 % of F.S. /°C <0.05 % of Rdg./°C Warm-up Time (to within 0.2% of F.S. of steady state performance) <2 min Controller Settling Time <2 sec Pressure Coefficient <0.02 % of Rdg./psi Normal Operating Temperature Range 0°Cto 50°C Input Voltage Required Max. current at start-up (first 2 sec) Typical current at seady state ± mA ± mA Set Point Command Signal 0 to 5 VDC Output Signal Connector Types Analog 9-pin “D” Type Wetted Materials Stan dard Optional (seals and valve seat) 316L S.S. , Viton® Leak lntegrity External (scc/sec He) Through closed valve <1 x 10-9 <1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is re commended.) Fittings (compatible with) Swagelok®4 VCR , 1/4” Swagelok® , Mapyeong-dong , Cheoin-gu Yongin-Si, Kyonggi-Do, Korea . Zip code : Tel : Fax : Web site : Advanced Technology Of Vacuum Application & Control