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현미경 분해능(Abbe’s law) R = = 400 nm = 1.7 Sin = 0.9 R = 150 nm M =
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전자현미경 분해능 R = 가속전압 200kV 일 때 = 0.00251 nm = 5 10 rad Light: 400nm
R = 0.3 nm Light: 400nm Electron: 0.004nm at 100keV nm at 200keV
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De Broglie’s Wavelength
전자의 파장 De Broglie’s Wavelength 가속전압(kV) 100 200 300 1000 파장(nm) 0.0037 = =
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Electromagnetic Range
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전자와 시편의 상호작용(비탄성산란) 2θ Incident Beam (Primary electron)
Backscattered electron Auger electron Secondary electron(SEM) Cathodoluminescence X-ray Absorbed electron Specimen 2θ Transmitted electron(TEM)
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전자와 시편의 상호작용
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K X-ray Generation
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Topographic Contrast
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Atomic Number Contrast
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SEM Image Produce
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Magnification
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