Advanced Technology Of Vacuum Application & Control AFC500 MASS FLOW CONTROLLER Type AFC500 GENERAL PURPOSE MASS FLOW CONTROLLER (Viton Seal) MFC는 Mass Flow Controller의 약자로서 Gas Bottle에서 나오는 GAS를 고객이 원하는 일정한 유량 의 값으로 흐르게 하기 위한 장치입니다. 단위로는 제조회사마다 약간의 차이를 보이지만 일반적으로 SCCM(Standard Cubic Centimeter per Minutes)을 사용합니다. Features & Benefits Dimensions ◎ AFC500 Mass Flow Controller는 일반적으로 산업용을 포함하여 반도체공정에도 사용할 수 있도록 설계되어 있습니다. ◎ AFC500 Mass Flow Controller의 Full Scale Range는 10SCCM부터 50SLM입니다. ◎ AFC500 Mass Flow Controller는 Full Scale의 1%에 해당하는 오차를 가지고 있습니다. ◎ AFC500 Mass Flow Controller는 Warm-up 시간이 거의 필요하지 않는 제품으로 설계되어 있습니다. ◎ AFC500 Mass Flow Controller는 기본적으로 9Pin D-sub Connector를 사용합니다. ◎ AFC500 Mass Flow Controller는 GMC1200과 같은 MFC Power Supply & Display Unit과 함께 사용할 수 있습니다. ◎ AFC500 Mass Flow Controller는 CE 인증 취득제품입니다. www.atovac.com Advanced Technology Of Vacuum Application & Control 1

Advanced Technology Of Vacuum Application & Control AFC500 MASS FLOW CONTROLLER Specifications Full S cale Ranges (N2 equivalent) 10,20,50,100,200,500,1000, 2000,5000,10000,20000, 50000 SCCM Maximum lnlet P ressure 150 psig Normal Operating Pressure Differential (with atmospheric pressure at the. MFCoutlet) 10 to 5000 sccm 10000 to 20000 sccm 10 to 40 psid 15 to 40 psid Control Range 2% to 100 % of F.S. Accuracy (analog) (including non-linearity, hysteresis, and non-repeata bility referenced to 760mmhg and 0°C) ±1.0% of F.S. Repeatability ±0.2% of F.S. Resolution 1.0% of F.S. Temperature Coefficients Zero Span <0.05 % of F.S. /°C <0.05 % of Rdg./°C Warm-up Time (to within 0.2% of F.S. of steady state performance) <2 min Controller Settling Time <2 sec Pressure Coefficient <0.02 % of Rdg./psi Normal Operating Temperature Range 0°Cto 50°C Input Voltage Required Max. current at start-up (first 2 sec) Typical current at seady state ±15 VDC(±5%) @ 200 mA ±15 VDC(±5%) @ 100 mA Set Point Command Signal 0 to 5 VDC Output Signal Connector Types Analog 9-pin “D” Type Wetted Materials Stan dard Optional (seals and valve seat) 316L S.S. , Viton® Leak lntegrity External (scc/sec He) Through closed valve <1 x 10-9 <1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is re commended.) Fittings (compatible with) Swagelok®4 VCR , 1/4” Swagelok® 176-11 , Mapyeong-dong , Cheoin-gu Yongin-Si, Kyonggi-Do, Korea . Zip code : 449-928 Tel : 82-31-526-0526 Fax : 82-70-8650-0526 Web site : http://www.atovac.com E-mail : atovac@atovac.com www.atovac.com Advanced Technology Of Vacuum Application & Control